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工程科学与技术:2020,52(5):230-235
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直驱气浮平台工作模态的分析方法及实验验证
(1.中国工程物理研究院 机械制造工艺研究所,四川 绵阳 621900;2.四川大学 机械工程学院,四川 成都 610065)
Analysis Method and Experimental Verification of the Operating Modal for the Direct-drive Air Bearing Stage
(1.Inst. of Mechanical Technol., China Academy of Eng. and Physics, Mianyang 621900, China;2.School of Mechanical Eng., Sichuan Univ., Chengdu 610065, China)
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投稿时间:2019-03-13    修订日期:2019-11-12
中文摘要: 直驱气浮平台是集气浮支承、伺服驱动及机械结构为一体的精密运动系统,具有较复杂的振动性能,一般通过模态分析得到机械结构的振动性能,但在工程应用中,更需要获得驱动作用下平台工作时的振动性能。因此,为简单、快捷、准确地分析平台工作状态的振动性能,本文提出一种机电耦合的振动分析方法,即将驱动系统的伺服特性和气浮支承的气膜特性均等效成弹簧阻尼单元,建立机电耦合仿真模型,基于该模型分析得到平台工作状态下的振动模态。为验证该方法,采用LMS模态测试仪对平台进行模态测试,试验结果同仿真结果较一致,基于此方法分析计算得到的振动模态最大偏差为8.16%。模态实验表明所提出的机电耦合模态分析方法可以准确地分析平台工作状态的振动特性。
Abstract:The direct-drive air bearing stage is a precise motion system integrating air bearing, servo drive and mechanical structure. There is more complex vibration characteristics in the stage. Generally, the vibration characteristics of the stage are analyzed by the vibration modes of the mechanical structure. But in engineering applications, the working modal of the stage under the driving force needed to be obtained. In this paper, to analyze the vibration characteristics of the working state of the stage simply, quickly and accurately, a new electric-mechanical coupling simulation method is presented. The servo characteristics of the drive system and the film characteristics of the air bearing were all equivalent to the spring damping units, and the electromechanical coupling simulation model of the direct-drive air bearing stage was established. Based on the model, the vibration modes under the working condition of the stage were obtained. To validate the analysis method,the LMS modal test instrument was used to test the modal of the real stage. The experimental results were consistent with the simulation results. The experimental results suggested that the maximum vibration deviation of the vibration modes calculated by the electromechanical coupling method was 8.16%. The experiments showed that the vibration characteristics of the working state of the stage could be accurately analyzed by the electromechanical coupled modal analysis method.
文章编号:201900213     中图分类号:TH161    文献标志码:
基金项目:国家科技重大专项(2017ZX04022001)
作者简介:陈东生(1972-),男,研究员,博士.研究方向:机电一体化.E-mail:13518311304@163.com
引用文本:
陈东生,楚翀,余德平,刘佳鑫.直驱气浮平台工作模态的分析方法及实验验证[J].工程科学与技术,2020,52(5):230-235.
CHEN Dongsheng,CHU Chong,YU Deping,LIU Jiaxin.Analysis Method and Experimental Verification of the Operating Modal for the Direct-drive Air Bearing Stage[J].Advanced Engineering Sciences,2020,52(5):230-235.